ELECTRON PROBE MICROANALYZER
Electron Probe Micro Analyzer (EPMA)
The EPMA system is used for both qualitative and quantitative, non-destructive surface analysis of materials. Elements to be analyzed by the system range from boron to uranium with sensitivity at the ppm level.
The system is equipped with analyzers and detectors for scanning electron microscopy, wavelength dispersive and energy dispersive spectroscopy and cathodoluminescence imaging. There are four spectrometers, each comes with two crystals for WDS analysis of different elements.
Contact person: Ms Xiao Fu (fuxa@hku.hk)
